| Stand-By | Ongoing | Functional |
| Scrubber | S-Gun | E-Beam SEM |
| Pyrox (APCVD) | E-Gun | Sentec |
| Mask Cleaner | Hotte litho | PolyVar |
| CMP | Hottes Alu | Vacotec |
| LP CVD Nitrure | K&W | |
| Dicing | Dektak | |
| Anodisation + hotte | Plasma (Orga) | |
| STS | Rinser-Dryers | |
| Electroplating | Hottes nettoyage | |
| RTA | Four Koyo Oxyde | |
| LP CVD PolySi | Four Koyo PolySi | |
| Fours Hydrox | Karl Suss Track | |
| Fours Omega | Spinner (Orga) | |
| Hotte TMAH | ||
| Spinner manuel | ||
| Oxygen Barrel | ||
| Grinder | ||
| RD600 | ||
| CPD | ||
| Electrotech | ||
| Hotte Organique | ||
| Nano Imprint | ||
Update 18-Feb-2009